PDMS as a sacrificial substrate for SU-8-based biomedical and microfluidic applications

Journal of Micromechanics and Microengineering

Volumn 18, Issue 9, 2008, Pages

  Patel, Jasbir N ^a   Kaminska, Bozena ^a   Gray, Bonnie L ^a   Gates, Byron D ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749087065     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/9/095028     Document Type: Article

References (52)

1. Tay F 2002 Microfluidics and BioMEMS Applications (Boston, MA: Kluwer)
2. Reyes D R, Iossifidis D, Auroux P A and Manz A 2002 Micro total analysis systems: 2. Analytical standard operations and applications Anal. Chem. 74 2636
3. Harrison D J, Manz A, Fan Z, Ludi H and Widmer H M 1992 Capillary electrophoresis and sample injection systems integrated on a planar glass chip Anal. Chem. 64 1926-32
4. Madou M 2001 Fundamentals of Micromachining (Boca Raton, FL: CRC Press)
5. Le Gac S and Rolando C 2002 Microsystems in chemistry Actual Chimique 2 21-32
6. Seong G H, Heo J and Crooks R M 2003 Measurement of enzyme kinetics using a continuous-flow microfluidic system Anal. Chem. 75 3161-7
7. Roper M G, Shackman J G, Dahlgren G M and Kennedy R T 2003 Microfluidic chip for continuous monitoring of hormone secretion from live cells using an electrophoresis-based immunoassay Anal. Chem. 75 4711-7
8. Lui J, Hansen C and Quake S R 2003 Solving the 'world-to-chip' interface problem with a microfluidic matrix Anal. Chem. 75 4718-23
9. http://www.istat.com.
10. http://www.micronics.com.
11. http://www.fluidigm.com.
12. Jo B H, Van Lerberghe L M, Motsegood K M and Beebe D J 2000 Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer J. Microelectromech. Syst. 9 76-81
13. Unger M A, Chou H P, Thorsen T, Scherer A and Quake S R 2000 Monolithic microfabricated valves and pumps by multilayer soft lithography Science 288 113-6
14. Neils C, Tyree Z, Finlayson B and Folch A 2004 Combinatorial mixing of microfluidic streaks Lab Chip 4 342-50
15. Aguirregabiria M, Blanco F J, Berganzo J, Ruano J, Aramburu I, Garcia J and Mayora K 2004 Novel SU8 multilayer technology based on successive CMOS compatible adhesive bonding and Kapton releasing steps for multilevel microfluidic devices Proc. 8th Int. Conf. Miniaturized Chemical and Biochemical Analysis Systems vol 2 pp 49-51
16. Balslev S, Bilenberg B, Geschke O, Jorgensen A M, Kristensen A, Kutter J P, Mogensen K B and Snakenborg D 2004 Fully integrated optical system for lab-on-a-chip applications Proc. 17th IEEE Int. Conf. MEMS pp 89-92
17. Ruhmann R, Pfeiffer K, Falenski M, Reuther F, Engelke R and Grutzner G 2001 SU-8-a high performance material for MEMS applications mstnews 1 45-6
18. Zhang J, Tan K L, Hong G D, Yan L J and Gong H Q 2001 Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS J. Micromech. Microeng. 11 20-6
19. Jackman R J, Floyd T M, Ghodssi R, Schmidt M A and Jensen K F 2001 Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy J. Micromech. Microeng. 11 263-9
20. Kim D S, Lee K-C, Kwon T H and Lee S S 2002 Micro-channel filling flow considering surface tension effect J. Micromech. Microeng. 12 236-46
21. Kruger J, Singh K, O'Neill A, Jackson C, Morrison A and O'Brien P 2002 Development of a microfluidic device for fluorescence activated cell sorting J. Micromech. Microeng. 12 486-94
22. van Kan J A, Bettiol A A, Wee B S, Sum T C, Tang S M and Watt F 2000 Proton beam micromachining: a new tool for precision three-dimensional microstructures Proc. EUROSENSORS: 14th European Conf. (Copenhagen, Denmark) pp 27-30
23. Chung C and Allen M 2005 Uncrosslinked SU-8 as a sacrificial material J. Micromech. Microeng. 15 1-5
24. Gray B L, Iordanov V P, Sarro P M and Bossche A 2002 SU-8 structures for integrated high-speed screening Proc. Micro Total Analysis Systems Conf. (Nara, Japan) pp 464-6
25. Wu C L, Chen M H and Tseng F G 2003 SU-8 hydrophilic modification by forming copolymer with hydrophilic epoxy molecule Proc. 7th Int. Conf. on Miniaturized Chemical and Biochemical Analysis Systems (Squaw Valley, USA) pp 1117-20
26. Helbo B, Kragh S, Kjeldsen B G, Reimers J L and Kristensen A 2004 Investigation of the dye concentration influence on the lasing wavelength and threshold for a micro-fluidic dye laser Sensor Actuators A 111 21-5
27. Ruano J M, Agirregabiria M, Tijero M, Arroyo M, Garcia J, Berganzo J, Aramburu I, Blanco F J and Mayora K 2004 Monolithic integration of microfluidic channels and optical waveguides using a photodefinable epoxy Proc. 17th IEEE Int. Conf. on MEMS (Maastricht, The Netherlands) pp 121-4
28. Damean N, Parviz B A, Lee J N, Odom T and Whitesides G M 2005 Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems J. Micromech. Microeng. 15 29-34
29. Blanco F J, Agirregabiria M, Garcia J, Berganzo J, Tijero M, Arroyo M T, Ruano J M, Aramburu I and Mayora K 2004 Novel three-dimensional embedded SU-8 microchannels fabricated using a low temperature full wafer adhesive bonding J. Micromech. Microeng. 14 1047-56
30. Chuang Y J, Tseng F G, Cheng J H and Lin W K 2003 A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists Sensors Actuators A 103 64-9
31. Bohl B, Steger R, Zengerle R and Koltay P 2005 Multi-layer SU-8 lift-off technology for microfluidic devices J. Micromech. Microeng. 15 1125-30
32. Guerin L J, Bossel M, Demierre M, Calmes S and Renaud P 1997 Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic Proc. Int. Solid State Sensors and Actuators Conf. (Transducers '97) (Chicago, IL) pp 1419-22
33. Yasukawa T, Glidle A, Nomura M and Cooper J M 2005 Fabrication of robust 2-D and 3-D microfluidic networks for lab-on-a-chip bioassays J. Microelectromech. Syst. 14 839-46
34. Alderman B E J, Mann C M, Steenson D P and Chamberlain J M 2001 Microfabrication of channels using an embedded mask in negative resist J. Micromech. Microeng. 11 703-5
35. Agirregabiria M, Blanco F J, Berganzo J, Arroyo M T, Fullaondo A, Mayora K and Ruano-Lopez J M 2005 Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps Lab Chip 5 545-52
36. Seidemann V, Rabe J, Feldmann M and Buttgenbach S 2002 SU8-micromechanical structures with in situ fabricated movable parts Microsyst. Technol. 8 348-50
37. Luo C, Govindaraju A, Garra J, Schneider T, White R, Currie J and Paranjape M 2004 Releasing SU-8 structures using polystyrene as a sacrificial material Sensor Actuators A 114 123-8
38. Ruano-Lopez J M, Aguirregabiria M, Arroyo M, Berganzo J, Blanco F J, de la Fuente P, Castano E and Mayora K 2004 An optical microfluidic platform based on a combination of a novel SU8 multilayer technology, waveguides and photodiodes on silicon Proc. 8th Int. Conf. Miniaturized Chemical and Biochemical Analysis Systems (Malmo, Sweden) vol 2 pp 34-6
39. Beche B, Pelletier N, Gaviot E and Zyss J 2004 Single-mode TE00-TM00 optical waveguides on SU-8 polymer Opt. Commun. 230 91-4
40. Ford S M, McCandless A B, Liu X and Soper S A 2001 Rapid fabrication of embossing tools for the production of polymeric microfluidic devices for bioanalytical applications Microfluidics and BioMEMS Proc. SPIE-The Int. Soc. Opt. Eng. 4560 207-16
41. Houlet L, Reyne G, Iizuka T, Bourouina T, Gergam E-D and Fujita H 2001 Copper micro-coil arrays for the actuation of optical matrix micro-switches Device and Process Technologies for MEMS and Microelectronics II Proc. SPIE-The Int. Soc. Opt. Eng. 4592 422-7
42. Seidemann V, Kohlmeier T, Fohse M, Gatzen H H and Buttgenbach S 2004 High aspect ratio spiral and vertical meander micro coils for actuator applications Microsyst. Technol. 10 564-70
43. Nguyen N T, Truong T Q, Wong K K, Ho S S and Low C L N 2004 Micro check valves for integration into polymeric microfluidic devices J. Micromech. Microeng. 14 69-75
44. Metz S, Jiguet S, Bertsch A and Renaud P 2004 Polyimide and SU-8 microfluidic devices manufactured by heat-depolymerizable sacrificial material technique Lab Chip 4 114-20
45. Foulds I G and Parameswaran M 2006 A planar self-sacrificial multilayer SU-8-based MEMS process utilizing a UV-blocking layer for the creation of freely moving parts J. Micromech. Microeng. 16 2109-15
46. Koester D, Cowen A, Mahadevan R, Stonefield M and Hardy B 2006 PolyMUMPs Design Handbook 11th edn (revised) (MEMSCAP) http://www.memsrus.com/documents/ PolyMUMPs.DR.v11.pdf
47. Chronis N and Lee L P 2004 Polymer MEMS-based microgripper for single cell manipulation Proc. 17th IEEE Int. Conf. Micro Electro Mechanical Systems (Maastricht, The Netherlands) pp 17-20
48. Gadre A P et al 2004 Fabrication of a fluid encapsulated dermal patch using multilayered SU-8 Sensor Actuators A 114 478-85
49. Abgrall P, Lattes C, Conedera V, Dollat X, Colin S and Gue A M 2006 A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films J. Micromech. Microeng. 16 113-21
50. Westwood S M, Jaffer S and Gray B L 2008 Enclosed SU-8 and PDMS microchannels with integrated interconnects for chip-to-chip and world-to-chip connections J. Micromech. Microeng. 18 064014
51. Patel J N, Kaminska B, Gray B L and Gates B D 2008 Hybrid polymer fabrication process for electro-enzymatic glucose sensor Proc. SPIE Photonics West 6886 688606
52. Jaffer S and Gray B L 2007 Mechanically assembled polymer interconnects with dead volume analysis for microfluidic systems Proc. SPIE Photonics West 6465 64650P1-12