-
3
-
-
76149095618
-
-
Alexander D.E., Cheung N.W., Park B., and Skorupa W. (Eds)
-
Simpson T.W., Goldberg R.D., Mitchell I.V., and Baribeau J.-M. In: Alexander D.E., Cheung N.W., Park B., and Skorupa W. (Eds). Mat. Res. Soc. Symp. Proc. 438. Materials Modification and Synthesis by Ion Beam Processing vol. 15 (1997)
-
(1997)
Materials Modification and Synthesis by Ion Beam Processing
, vol.15
-
-
Simpson, T.W.1
Goldberg, R.D.2
Mitchell, I.V.3
Baribeau, J.-M.4
-
4
-
-
0032607128
-
-
Castell M.R., Simpson T.W., Mitchell I.V., Perovic D.D., and Baribeau J.-M. Appl. Phys. Lett. 74 (1999) 2304
-
(1999)
Appl. Phys. Lett.
, vol.74
, pp. 2304
-
-
Castell, M.R.1
Simpson, T.W.2
Mitchell, I.V.3
Perovic, D.D.4
Baribeau, J.-M.5
-
5
-
-
76149143380
-
-
Jones K.S., Giles M.D., stolk P., Matsuo J., and Jones E.C. (Eds)
-
Kobayashi H., Nomachi I., Kusanagi S., and Nishiyama F. In: Jones K.S., Giles M.D., stolk P., Matsuo J., and Jones E.C. (Eds). Mat. Res. Soc. Symp. Proc. 669. Si Front-End Proceeding - Physics and Technology of Dopant-Defect Interactions III vol. J.5.3.1 (2001)
-
(2001)
Si Front-End Proceeding - Physics and Technology of Dopant-Defect Interactions III
, vol.J.5.3.1
-
-
Kobayashi, H.1
Nomachi, I.2
Kusanagi, S.3
Nishiyama, F.4
-
8
-
-
0001282491
-
-
Pelaz L., Jaraiz M., Gilmer G.H., Gossmann H.J., Rafferty C.S., Eaglesham D.J., and Poate J.M. Appl. Phys. Lett. 70 (1997) 2285
-
(1997)
Appl. Phys. Lett.
, vol.70
, pp. 2285
-
-
Pelaz, L.1
Jaraiz, M.2
Gilmer, G.H.3
Gossmann, H.J.4
Rafferty, C.S.5
Eaglesham, D.J.6
Poate, J.M.7
-
9
-
-
17044405098
-
-
Aboy M., Pelaz L., Marques L.A., Lopez P., Barbolla J., Duffy R., Venezia V.C., and Griffin P.B. Appl. Phys. Lett. 83 (2005) 31908
-
(2005)
Appl. Phys. Lett.
, vol.83
, pp. 31908
-
-
Aboy, M.1
Pelaz, L.2
Marques, L.A.3
Lopez, P.4
Barbolla, J.5
Duffy, R.6
Venezia, V.C.7
Griffin, P.B.8
-
10
-
-
33947706662
-
-
Romano L., Maria Piro A., Mirabella S., and Grimaldi M.G. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 257 (2007) 146
-
(2007)
Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms
, vol.257
, pp. 146
-
-
Romano, L.1
Maria Piro, A.2
Mirabella, S.3
Grimaldi, M.G.4
-
11
-
-
33751416069
-
-
Pelaz L., Aboy M., Lopez P., Marques L.A., and Santos I. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 253 (2006) 41
-
(2006)
Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms
, vol.253
, pp. 41
-
-
Pelaz, L.1
Aboy, M.2
Lopez, P.3
Marques, L.A.4
Santos, I.5
-
13
-
-
3342928693
-
-
Kyllesbech Larsen K., Privetera V., Coffa S., Priolo F., Campisano S.U., and Carnera A. Phys. Rev. Lett. 76 (1996) 1493
-
(1996)
Phys. Rev. Lett.
, vol.76
, pp. 1493
-
-
Kyllesbech Larsen, K.1
Privetera, V.2
Coffa, S.3
Priolo, F.4
Campisano, S.U.5
Carnera, A.6
-
14
-
-
0030566616
-
-
Cowern N., Huizing H.G.A., Stolk P.A., Visser C.C.G., de Kruif R.C.M., Kyllesbech Larsen K., privetera V., Nanver L.K., and Crans W. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 120 (1996) 14
-
(1996)
Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms
, vol.120
, pp. 14
-
-
Cowern, N.1
Huizing, H.G.A.2
Stolk, P.A.3
Visser, C.C.G.4
de Kruif, R.C.M.5
Kyllesbech Larsen, K.6
privetera, V.7
Nanver, L.K.8
Crans, W.9
-
17
-
-
34547224539
-
-
Boninelli S., Mirabella S., Bruno E., Priolo F., Cristiano F., Claverie A., De Salvador D., Bisognin G., and Napolitani E. Appl. Phys. Lett. 91 (2007) 31905
-
(2007)
Appl. Phys. Lett.
, vol.91
, pp. 31905
-
-
Boninelli, S.1
Mirabella, S.2
Bruno, E.3
Priolo, F.4
Cristiano, F.5
Claverie, A.6
De Salvador, D.7
Bisognin, G.8
Napolitani, E.9
-
18
-
-
58049116507
-
3D atomic-scale imaging of boron clusters in implanted silicon
-
Cojocaru-Miredin O., Cadel E., Vurpillot F., Mangelinck D., and Blavette D. 3D atomic-scale imaging of boron clusters in implanted silicon. Scr. Mater. 60 (2009) 285-288
-
(2009)
Scr. Mater.
, vol.60
, pp. 285-288
-
-
Cojocaru-Miredin, O.1
Cadel, E.2
Vurpillot, F.3
Mangelinck, D.4
Blavette, D.5
-
19
-
-
66549127859
-
-
Ngamo M., Duguay S., Cristiano F., Daoud-Ketata K., and Pareige P. J. Appl. Phys. 105 (2009) 104904
-
(2009)
J. Appl. Phys.
, vol.105
, pp. 104904
-
-
Ngamo, M.1
Duguay, S.2
Cristiano, F.3
Daoud-Ketata, K.4
Pareige, P.5
-
20
-
-
4243412773
-
-
Mirabella S., Coati A., De Salvador D., Napolitani E., Mattoni A., Bisognin G., Berti M., Carnera A., Drigo A.V., Scalese S., Pulvirenti S., Terrasi A., and Priolo F. Phys. Rev., B 65 (2002) 45209
-
(2002)
Phys. Rev., B
, vol.65
, pp. 45209
-
-
Mirabella, S.1
Coati, A.2
De Salvador, D.3
Napolitani, E.4
Mattoni, A.5
Bisognin, G.6
Berti, M.7
Carnera, A.8
Drigo, A.V.9
Scalese, S.10
Pulvirenti, S.11
Terrasi, A.12
Priolo, F.13
-
21
-
-
0000301643
-
-
Cowern N.E.B., Cacciato A., Custer J.S., Saris F.W., and Vandervorst W. Appl. Phys. Lett. 68 (1996) 1150
-
(1996)
Appl. Phys. Lett.
, vol.68
, pp. 1150
-
-
Cowern, N.E.B.1
Cacciato, A.2
Custer, J.S.3
Saris, F.W.4
Vandervorst, W.5
-
22
-
-
0000077773
-
-
Rücker H., Heinemann B., Röpke W., Kurps R., Krüger D., Lippert G., and Osten H.J. Appl. Phys. Lett. 73 (1998) 1682
-
(1998)
Appl. Phys. Lett.
, vol.73
, pp. 1682
-
-
Rücker, H.1
Heinemann, B.2
Röpke, W.3
Kurps, R.4
Krüger, D.5
Lippert, G.6
Osten, H.J.7
-
23
-
-
0032586219
-
-
Larson D.J., Foord D.T., Petford-Long A.K., Liew H., Blamire M.G., Cerezo A., and Smith G.D.W. Ultramicroscopy 79 (1999) 287
-
(1999)
Ultramicroscopy
, vol.79
, pp. 287
-
-
Larson, D.J.1
Foord, D.T.2
Petford-Long, A.K.3
Liew, H.4
Blamire, M.G.5
Cerezo, A.6
Smith, G.D.W.7
-
25
-
-
76149145680
-
-
Deconihout B., Vurpillot F., Gault B., Da costa G., Bouet M., Bostel A., Hideur A., Martel G., Brunel M., and Blavette D. Surf. Interface Anal. 38 (2006)
-
(2006)
Surf. Interface Anal.
, vol.38
-
-
Deconihout, B.1
Vurpillot, F.2
Gault, B.3
Da costa, G.4
Bouet, M.5
Bostel, A.6
Hideur, A.7
Martel, G.8
Brunel, M.9
Blavette, D.10
-
26
-
-
33646392741
-
-
Gault B., Vurpillot F., Gilbert M., Vella A., Menand A., Blavette D., and Deconihout B. Rev. Sci. Instrum. 77 (2006) 43705
-
(2006)
Rev. Sci. Instrum.
, vol.77
, pp. 43705
-
-
Gault, B.1
Vurpillot, F.2
Gilbert, M.3
Vella, A.4
Menand, A.5
Blavette, D.6
Deconihout, B.7
-
27
-
-
68649086109
-
-
T. Philippe. F. De Geuser, S. Duguay, W. Lefebvre, O. Cojocaru-Mirédin, G. Da Costa, D. Blavette, Ultramicroscopy 109 (2009) 1304.
-
(2009)
Ultramicroscopy
, vol.109
, pp. 1304
-
-
Philippe, T.1
De Geuser, F.2
Duguay, S.3
Lefebvre, W.4
Cojocaru-Mirédin, O.5
Da Costa, G.6
Blavette, D.7
|