Role of C and B clusters in transient diffusion of B in silicon

Applied Physics Letters

Volumn 68, Issue 8, 1996, Pages 1150-1152

  Cowern, N E B ^a   Cacciato, A ^b   Custer, J S ^b   Saris, F W ^b   Vandervorst, W ^c  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b FOM INSTITUTE AMOLF   (Netherlands)

^c IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000301643     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115706     Document Type: Article

References (16)

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