Three-dimensional atomic-scale imaging of boron clusters in implanted silicon

Scripta Materialia

Volumn 60, Issue 5, 2009, Pages 285-288

  Cojocaru Miredin O ^a   Cadel, E ^a   Vurpillot, F ^a   Mangelinck, D ^b,c   Blavette, D ^a,d  

^a UNIVERSITÉ DE ROUEN   (France)

^b AIX MARSEILLE UNIVERSITÉ   (France)

^c AIX MARSEILLE UNIVERSITY   (France)

^d INSTITUT UNIVERSITAIRE DE FRANCE   (France)

Author keywords

Boron; Clustering; Implanted silicon; Laser atom probe tomography; Microelectronics

Indexed keywords

ATOMS; BORON; MICROELECTRONICS; PROBES; SECONDARY ION MASS SPECTROMETRY; SILICON;

ATOM PROBE TOMOGRAPHY; ATOMIC SCALE IMAGING; BORON CLUSTERS; BORON IN SILICON; BORON-INTERSTITIAL CLUSTERS; CLUSTERING; IMPLANTATION PROFILES; LASER-ASSISTED;

ATOM LASERS;

EID: 58049116507     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2008.10.008     Document Type: Article

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