Micromachining of an SU-8 flapping-wing flying micro-electro-mechanical system

Journal of Micromechanics and Microengineering

Volumn 19, Issue 8, 2009, Pages

  Dargent, T ^a,b,c   Bao, X Q ^b,d   Grondel, S ^a,b   Brun, G Le ^a,b   Paquet, J B ^c   Soyer, C ^a,b   Cattan, E ^a,b  

^a UNIV LILLE   (France)

^b INSTITUT D ELECTRONIQUE   (France)

^c ONERA   (France)

^d SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BIOMIMETICS; COMPOSITE MICROMECHANICS; FINITE ELEMENT METHOD; MECHANICS; MICROMACHINING; PHOTORESISTS; WINGS;

ADVANCED ENGINEERINGS; FLAPPING FREQUENCY; FLYING MACHINES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO ELECTRO MECHANICAL SYSTEM; SENSORS AND ACTUATORS; SU-8 PHOTORESIST; WIRELESS RECEIVERS;

MEMS;

EID: 70350660685     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/8/085028     Document Type: Article

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