Improved fabrication of micro air-channels by incorporation of a structural barrier

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 35-42

  Joseph, Paul Jayachandran ^a   Kelleher, Hollie A ^a   Bidstrup Allen, Sue Ann ^a   Kohl, Paul A ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DECOMPOSITION; DISSOLUTION; ETCHING; FLUIDIC DEVICES; MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCARBONATES; REACTIVE ION ETCHING; SILICA; SILICON WAFERS; SOLVENTS; STRESSES; THIN FILMS; ULTRAVIOLET RADIATION;

MICRO AIR-CHANNELS; PHOTOPATTERNED; POLYMER OVERCOAT; WET-CHEMICAL ETCH;

MICROELECTROMECHANICAL DEVICES;

EID: 12344330374     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/006     Document Type: Article

References (10)

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