Control of the out-of-plane curvature in SU-8 compliant microstructures by exposure dose and baking times

Journal of Micromechanics and Microengineering

Volumn 17, Issue 5, 2007, Pages 1093-1098

  Sameoto, D ^a   Tsang, S H ^a   Foulds, I G ^a   Lee, S W ^a   Parameswaran, M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; CROSSLINKING; MICROSTRUCTURE; THICKNESS MEASUREMENT;

BAKING; OUT-OF-PLANE STRESS; PROCESS PARAMETERS; ZERO CURVATURE CONDITION;

MICROMECHANICS;

EID: 34247481384     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/5/032     Document Type: Article

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