Silicon nanostencils with integrated support structures

Microelectronic Engineering

Volumn 87, Issue 4, 2010, Pages 652-657

  Fostner, Shawn ^a   Burke, Sarah A ^b   Topple, Jessica ^a   Mativetsky, Jeffrey M ^c   Beerens, Jean ^d   Grutter, Peter ^a  

^a MCGILL UNIVERSITY   (Canada)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITÉ DE STRASBOURG   (France)

^d UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

Film stress; MEMS; Nanostructuring; Pattern transfer; Silicon stencil; Stabilization structures; Stencil deformation; Tantalum film

Indexed keywords

FILM STRESS; NANO-STRUCTURING; PATTERN TRANSFER; PATTERN TRANSFERS; TANTALUM FILMS;

BENDING (DEFORMATION); DEFLECTION (STRUCTURES); FLEXIBLE STRUCTURES; MEMS; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; NANOWIRES; SILICON WAFERS; SINGLE CRYSTALS; STABILIZATION; TANTALUM;

MEMBRANE STRUCTURES;

EID: 75149175055     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.09.004     Document Type: Article

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