Coefficient of thermal expansion and biaxial elastic modulus of Β phase tantalum thin films

Applied Physics Letters

Volumn 90, Issue 18, 2007, Pages

  Knepper, Robert ^a   Baker, Shefford P ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FUSED SILICA; HEATING; MICROCRYSTALLINE SILICON; TANTALUM; THERMAL EXPANSION;

BIAXIAL ELASTIC MODULUS; PHASE FILMS;

THIN FILMS;

EID: 34247869021     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2734468     Document Type: Article

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