Design and fabrication of thin film lamb wave resonators utilizing longitudinal wave and interdigital transducers

Proceedings - IEEE Ultrasonics Symposium

Volumn 3, Issue , 2005, Pages 1580-1583

  Yantchev, Ventsislav ^a   Katardjiev, Ilia ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; MAGNETRON SPUTTERING; PHOTOLITHOGRAPHY; THIN FILM DEVICES; ULTRASONIC TRANSDUCERS;

FULL WIDTH HALF MAXIMUM (FWHM) VALUE; INTERDIGITAL TRANSDUCERS; PIEZOELECTRIC FILMS; THIN FILM LAMB WAVE RESONATORS;

RESONATORS;

EID: 33744547159     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603162     Document Type: Conference Paper

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