Study of aluminium nitride/freestanding diamond surface acoustic waves filters

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 723-727

  Mortet, V ^a   Elmazria, O ^b   Nesladek, M ^a   D'Haen, J ^a   Vanhoyland, G ^a   Elhakiki, M ^b   Tajani, A ^c   Bustarret, E ^c   Gheeraert, E ^c   D'Olieslaeger, M ^a,d   Alnot, P ^b  

^a HASSELT UNIVERSITY   (Belgium)

^b INSTITUT JEAN LAMOUR   (France)

^c LABORATOIRE DE CRISTALLOGRAPHIE   (France)

^d HASSELT UNIVERSITY   (Belgium)

Author keywords

Aluminium nitride; Diamond film; High frequency electronics; Surface acoustic wave device

Indexed keywords

ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ELECTRIC PROPERTIES; INSERTION LOSSES; POLYCRYSTALLINE MATERIALS;

PHASE VELOCITY;

ACOUSTIC SURFACE WAVE FILTERS;

DIAMOND;

EID: 0038184125     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00316-3     Document Type: Article

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