Shear mode bulk acoustic wave resonator based on c -axis oriented AlN thin film

Journal of Applied Physics

Volumn 104, Issue 8, 2008, Pages

  Milyutin, Evgeny ^a   Gentil, Sandrine ^a   Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC WAVES; ELASTIC WAVES; ELECTRIC FIELDS; RESONANCE; RESONATORS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; THICK FILMS; THIN FILMS;

ALN FILMS; ALN THIN FILMS; BULK ACOUSTIC WAVE RESONATORS; BULK ACOUSTIC WAVES; BULK WAVES; C -AXIS; EXPERIMENTAL FREQUENCIES; INTERDIGITATED ELECTRODES; Q FACTORS; SHEAR MODE RESONATORS; SHEAR MODES; SILICON OILS; SIMULATION CALCULATIONS; THICK ALN LAYERS;

ACOUSTICS;

EID: 55249122459     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2996319     Document Type: Article

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