Design of high frequency piezoelectric resonators utilizing laterally propagating fast modes in thin aluminum nitride (AlN) films

Ultrasonics

Volumn 45, Issue 1-4, 2006, Pages 208-212

  Yantchev, V ^a   Enlund, J ^a   Biurstrom J ^a   Katardjiev, I ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

AlN; Integrated devices; Lamb; Resonator; SAW; Sputtering

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE PROPAGATION; ALUMINUM NITRIDE; MAGNETRON SPUTTERING; PHOTOLITHOGRAPHY; PIEZOELECTRIC DEVICES; THIN FILMS;

FULL WIDTH HALF MAXIMUM (FWHM) VALUE; INTEGRATED DEVICES; LAMB MODES; SURFACE ACOUSTIC WAVE (SAW);

RESONATORS;

EID: 33751108803     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultras.2006.09.008     Document Type: Article

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