Multilayer film piezoelectric lamb wave resonator for several GHz applications

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2006, Pages 797-800

  Matsumoto, Hisanori ^a   Isobe, Atsushi ^a   Asai, Kengo ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRODES; MULTILAYER FILMS; PIEZOELECTRICITY; SURFACE WAVES;

PIEZOELECTRIC AIN LAYERS; PIEZOELECTRIC LAMB WAVE (PLW);

CRYSTAL RESONATORS;

EID: 39049129792     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2006.275490     Document Type: Conference Paper

References (10)

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