SAW COM-parameter extraction in AlN/diamond layered structures

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 50, Issue 11, 2003, Pages 1542-1547

  Iriarte, Gonzalo F ^a   Engelmark, Fredrik ^a   Katardjiev, Ilia V ^a   Plessky, Viktor ^a,b   Yantchev, Ventsislav ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b Rue Du Chateau 9c ^*  (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM NITRIDE; CALCULATIONS; CRYSTAL GROWTH; CURVE FITTING; DIAMONDS; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS;

DISPERSION CURVES; MAGNETRON REACTIVE SPUTTER DEPOSITION; POLYCRYSTALLINE DIAMOND SUBSTRATES; THIN PIEZOELECTRIC FILMS;

PIEZOELECTRIC MATERIALS;

EID: 1042289268     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2003.1251137     Document Type: Article

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