Thin film Lamb wave resonant structures - The first approach

Solid-State Electronics

Volumn 50, Issue 3, 2006, Pages 322-326

  Bjurstrom J ^a   Yantchev, V ^a   Katardjiev, I ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Acoustics; Aluminum nitride; Integrated devices; Plate waves; Resonators; Thin films

Indexed keywords

ALUMINUM NITRIDE; SURFACE WAVES; THIN FILMS; TOPOLOGY; TRANSDUCERS;

INTER-DIGITAL TRANSDUCERS (IDT); LONGITUDINAL WAVE (LW) TRANSDUCERS; SURFACE ACOUSTIC WAVES; THIN FILM MEMBRANES;

RESONANCE;

EID: 33646118492     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2006.01.012     Document Type: Article

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