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Advances in Applied Ceramics

Volumn 108, Issue 8, 2009, Pages 454-460

Polymer derived ceramics in MEMS/NEMS - A review on production processes and application

(1) Schulz, M a

a KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

Author keywords

Lithography; MEMS; NEMS; Polymer derived ceramics; Preceramic polymers

Indexed keywords

DIRECT METHOD; ENERGY SOURCE; HARSH ENVIRONMENT; HIGH TEMPERATURE; MEMS/NEMS; NANO ELECTROMECHANICAL SYSTEMS; NONOXIDE CERAMICS; POLYMER-DERIVED CERAMICS; PRECERAMIC POLYMER; PRECERAMIC POLYMERS; PRINTING PROCESS; PRODUCTION PROCESS; SOFT LITHOGRAPHY;

CERAMIC MATERIALS; ELECTRON BEAMS; MEMS; MICROELECTROMECHANICAL DEVICES; POLYMERS;

LITHOGRAPHY;

EID: 72749128254 PISSN: 17436753 EISSN: 17436761 Source Type: Journal
DOI: 10.1179/174367609X422171 Document Type: Review

Times cited : (68)

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