Fabrication of multi-layered SiCN ceramic MEMS using photo-polymerization of precursor

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 86-89

  Liew, L A ^a   Luo, R ^a   Liu, Y ^a   Zhang, W ^a   An, L ^a   Bright, V M ^a   Dunn, M L ^a   Daily, J W ^a   Raj, R ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTROSTATIC ACTUATORS; FABRICATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MULTILAYERS; PHOTOLITHOGRAPHY; PHOTOPOLYMERIZATION; POLYMERS; PRESSURE TRANSDUCERS; THERMAL EFFECTS; ULTRAVIOLET RADIATION;

LIQUID-PHASE POLYMERS;

SILICON COMPOUNDS;

EID: 0035005739     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)