Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer

Sensors and Actuators, A: Physical

Volumn 95, Issue 2-3, 2002, Pages 120-134

  Liew, Li Anne ^a   Liu, Yiping ^a   Luo, Ruiling ^a   Cross, Tsali ^a   An, Linan ^a   Bright, Victor M ^a   Dunn, Martin L ^a   Daily, John W ^a   Raj, Rishi ^a  

^a UCB 450   (United States)

Author keywords

Ceramic; Fabrication; MEMS; Polymer; SiCN

Indexed keywords

CERAMIC MATERIALS; CROSSLINKING; FABRICATION; HIGH TEMPERATURE APPLICATIONS; INITIATORS (CHEMICAL); LIQUID CRYSTAL POLYMERS; PHOTOLITHOGRAPHY; PHOTOPOLYMERIZATION; PYROLYSIS; SILICON CARBIDE; STRUCTURE (COMPOSITION);

ISOSTATIC PRESSURE; LIQUID POLYSILAZANE; PRE CERAMIC POLYMER; SILICON CARBONITRIDE MICROELECTROMECHANICAL SYSTEM;

MICROELECTROMECHANICAL DEVICES;

EID: 0036141581     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00723-3     Document Type: Article

References (10)

1. 4 by APCVD
2. Synthesis of dense silicon-based ceramics at low-temperature
3. Development of injectable, polymer-derived ceramics for high-temperature MEMS
4. Fabrication of SiCN ceramic MEMS using injectable polymer precursor technique
5. Real three-dimensional microfabrication using stereo lithography and metal molding
6. Optical power-induced damage to microelectro-mechanical mirrors