Fabrication of microfluidic channels derived from a UV/thermally cured preceramic polymer via a soft lithographic technique

Microelectronic Engineering

Volumn 84, Issue 12, 2007, Pages 2892-2895

  Lee, Hong Joo ^a   Yoon, Tae Ho ^b   Kim, Dong Pyo ^b  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Chungnam National University   (South Korea)

Author keywords

Microfabrication; Microfluidics; Non oxide ceramics; Polyvinylsilazane

Indexed keywords

LITHOGRAPHY; MICROFABRICATION; MICROFLUIDICS; THERMODYNAMIC STABILITY; ULTRAVIOLET RADIATION;

NON-OXIDE CERAMICS; POLYVINYLSILAZANE; PRECERAMIC POLYMERS;

SILICON CARBIDE;

EID: 36148934121     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.03.002     Document Type: Article

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