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Volumn 510-511, Issue , 2006, Pages 774-777
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Synthesis of polymeric precursor for oxidation-resistant SiCBN ceramic microstructure via soft lithography
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Author keywords
Borazine; Microstructure; SiCBN ceramic; Soft lithography
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Indexed keywords
CERAMIC MATERIALS;
LITHOGRAPHY;
MEMS;
MICROSTRUCTURE;
NUCLEAR MAGNETIC RESONANCE;
OXIDATION;
SILICON CARBIDE;
SYNTHESIS (CHEMICAL);
THERMOGRAVIMETRIC ANALYSIS;
X RAY DIFFRACTION;
HYDROBORATION;
POLYMER-TO-CERAMIC CONVERSION;
POLYMERIC PRECURSOR;
SOFT LITHOGRAPHY;
POLYMERS;
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EID: 35748985883
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/0-87849-995-4.774 Document Type: Conference Paper |
Times cited : (7)
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References (12)
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