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Volumn 510-511, Issue , 2006, Pages 774-777

Synthesis of polymeric precursor for oxidation-resistant SiCBN ceramic microstructure via soft lithography

Author keywords

Borazine; Microstructure; SiCBN ceramic; Soft lithography

Indexed keywords

CERAMIC MATERIALS; LITHOGRAPHY; MEMS; MICROSTRUCTURE; NUCLEAR MAGNETIC RESONANCE; OXIDATION; SILICON CARBIDE; SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS; X RAY DIFFRACTION;

EID: 35748985883     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-995-4.774     Document Type: Conference Paper
Times cited : (7)

References (12)
  • 3
    • 35748931626 scopus 로고    scopus 로고
    • M. Takamizawa, T. Kobayashi, A. Hayashida and Y. Takeda: U.S.Patent 4,604,367 (1986)
    • M. Takamizawa, T. Kobayashi, A. Hayashida and Y. Takeda: U.S.Patent 4,604,367 (1986)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.