A study on structural, optical, electrical and microstructural properties of thin TiOx films upon thermal oxidation: Effect of substrate temperature and oxidation temperature

Physica B: Condensed Matter

Volumn 405, Issue 1, 2010, Pages 85-93

  Sreemany, Monjoy ^a   Bose, Ankita ^a   Sen, Suchitra ^a  

^a CSIR CENTRAL GLASS AND CERAMIC RESEARCH INSTITUTE   (India)

Author keywords

Optical and electrical properties; RF magnetron sputtering; Scanning electron microscopy; Thermal oxidation; TiOx thin films

Indexed keywords

OPTICAL AND ELECTRICAL PROPERTIES; RF-MAGNETRON SPUTTERING; THERMAL OXIDATION; TIO; TIOX THIN FILMS;

ACTIVATION ENERGY; CRYSTALLITE SIZE; ELECTRIC PROPERTIES; INTEGRATED OPTOELECTRONICS; MAGNETRON SPUTTERING; MAGNETRONS; ORGANIC POLYMERS; OXIDATION; OXIDE MINERALS; OXYGEN; REFRACTIVE INDEX; SCANNING; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; TITANIUM; TITANIUM DIOXIDE; TITANIUM OXIDES;

OPTICAL FILMS;

EID: 71849092991     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2009.08.031     Document Type: Article

References (35)

1. Babaei F.-H., Keshmiri M., Kakavand M., and Troczynski T. Sensors Actuators B 110 (2005) 28
2. Zheng L., Xu M., and Xu T. Sensors Actuators B 66 (2000) 28
3. Lee S.C., Yu H., Yu J., and Ao C.H. J. Cryst. Growth 295 (2006) 60
4. Stamate M.D. Appl. Surf. Sci. 218 (2003) 317
5. Yang W., and Wolden C.A. Thin Solid Films 515 (2006) 1708
6. Millon C., Malhaire C., and Barbier D. Sensors Actuators A 113 (2004) 376
7. Bouregba R., Poullain G., Valquin B., and Murray H. Mater. Res. Bull. 35 (2000) 1381
8. Miao L., Jin P., Kaneko K., Terai A., Nabatova-Gabain N., and Tanemura S. Appl. Surf. Sci. 212-213 (2003) 255
9. Luca D., Macovei D., and Teodorescu C.-M. Surf. Sci. 600 (2006) 4342
10. Yao J., Shao J., He H., and Fan Z. Vacuum 81 (2007) 1023
11. Banakh O., Schmid P.E., Sanjinés R., and Lévy F. Surf. Coatings Technol. 151-152 (2002) 272
12. Sreemany M., and Sen S. Mater. Chem. Phys. 83 (2004) 169
13. Brama Y.L., Sun Y., Dangeti S.R.K., and Mujahid M. Surf. Coatings Technol. 195 (2005) 189
14. Jun Y.-K., Kim H.-S., Lee J.-H., and Hong S.-H. Sensors Actuators B 107 (2005) 264
15. Ting C.-C., Chen S.-Y., and Liu D.-M. Thin Solid Films 402 (2002) 290
16. Amor S.B., Guedri L., Baud G., Jacquet M., and Ghedira M. Mater. Chem. Phys. 77 (2002) 903
17. Hu Z., Huang Z., Lai Z., Wang G., and Chu J. Thin Solid Films 437 (2003) 223
18. Mor G.K., Varghese O.K., Paulose M., Ong K.G., and Grimes C.A. Thin Solid Films 496 (2006) 42
19. Anderson O., Bange K., and Ottermann C. In: Bach H., and Krause D. (Eds). Thin films on Glass (1997), Springer, Berlin 137
20. Vargheese K.D., Rao G.M., Balasubramanian T.V., and Kumar S. Mater. Sci. Eng. B 83 (2001) 242
21. Cai K., Müller M., Bossert J., Rechtenbach A., and Jandt K.D. Appl. Surf. Sci. 250 (2005) 252
22. Hofmann K., Spangenberg B., Luysberg M., and Kurz H. Thin Solid Films 436 (2003) 168
23. Jeyachandran Y.L., Karunagaran B., Narayandass S.K., Mangalaraj D., Jenkins T.E., and Martin P.J. Mater. Sci. Eng. A 431 (2006) 277
24. Tomaszewski H., Poelman H., Depla D., Poelman D., Gryse R.D., Fiermans L., Reyniers M.-F., Heynderickx G., and Marin G.B. Vacuum 68 (2003) 31
25. Okimura K., Maeda N., and Shibata A. Thin Solid Films 281-282 (1996) 427
26. Amor S.B., Baud G., Besse J.P., and Jacquet M. Thin Solid Films 293 (1997) 163
27. Ting C.-C., and Chen S.-Y. J. Appl. Phys. 88 (2000) 4628
28. Rogers Jr. J.W., Erickson K.L., Belton D.N., Springer R.W., Taylor T.N., and Beery J.G. Appl. Surf. Sci. 35 (1988) 137
29. Martin M., Mader W., and Fromm E. Thin Solid films 250 (1994) 61
30. Martin N., Rousselot C., Rondot D., Palmino F., and Mercier R. Thin Solid Films 300 (1997) 113
31. Thornton J.A. J. Vac. Sci. Technol. 11 (1974) 666
32. In: Lide D.R., and Frederikse H.P.R. (Eds). CRC Handbook of Chemistry and Physics. seventy-fifth ed. (1994), CRC Press, Boca Raton, FL pp. 4-108
33. Yokota K., Yamada T., Miyashita F., Hirai K., Takano H., and Kumagai M. Thin Solid Films 334 (1998) 109
34. Tauc J. In: Tauc J. (Ed). Amorphous and Liquid Semiconductors (1974), Plenum Press, New York 159
35. Sreemany M., and Sen S. Mater. Res. Bull. 42 (2007) 177