SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Surface and Coatings Technology

Volumn 195, Issue 2-3, 2005, Pages 189-197

Response of sputtered titanium films on silicon to thermal oxidation

(4) Brama, Y L a Sun, Y a Dangeti, S R K a Mujahid, M a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

Adhesion; Oxidation; Rutile; Silicides; Titanium; Titanium oxide

Indexed keywords

MAGNETRON SPUTTERING; MICROANALYSIS; SILICON WAFERS; THIN FILMS; TITANIUM DIOXIDE; X RAY DIFFRACTION;

ADHESION STRENGTH; INTERFACE STRUCTURES; THERMAL OXIDATION; TITANIUM FILMS;

OXIDATION;

OXIDATION; SILICON; SPUTTERING; TITANIUM;

EID: 16244383520 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.11.016 Document Type: Article

Times cited : (18)

References (26)

1
- 0037233037
- U. Diebold Surf. Sci. 48 2003 53
- (2003) Surf. Sci. , vol.48 , pp. 53
- Diebold, U.¹

2
- 0028516346
- P. Lobl D. Huppertz D. Mergel Thin Solid Films 251 1994 72
- (1994) Thin Solid Films , vol.251 , pp. 72
- Lobl, P.¹ Huppertz, D.² Mergel, D.³

3
- 0034187299
- H.K. Jang S.W. Whangbo H.B. Kim K.Y. Im Y.S. Lee I.W. Lyo C.N. Whang J. Vac. Sci. Technol., A, Vac. Surf. Films 18 3 2000 917
- (2000) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.18 , Issue.3 , pp. 917
- Jang, H.K.¹ Whangbo, S.W.² Kim, H.B.³ Im, K.Y.⁴ Lee, Y.S.⁵ Lyo, I.W.⁶ Whang, C.N.⁷

4
- 0031143137
- N. Martin C. Rousselot D. Rondot F. Palmino R. Mercier Thin Solid Films 300 1997 113
- (1997) Thin Solid Films , vol.300 , pp. 113
- Martin, N.¹ Rousselot, C.² Rondot, D.³ Palmino, F.⁴ Mercier, R.⁵

5
- 0027541413
- L.J. Meng M. Andritschky M.P. dos Santos Thin Solid Films 223 1993 242
- (1993) Thin Solid Films , vol.223 , pp. 242
- Meng, L.J.¹ Andritschky, M.² dos Santos, M.P.³

6
- 0034140675
- R. Dannenberg P. Greene Thin Solid Films 360 2000 122
- (2000) Thin Solid Films , vol.360 , pp. 122
- Dannenberg, R.¹ Greene, P.²

7
- 0034351315
- F. Lapostolle A. Billard J. von Stebut Surf. Coat. Technol. 135 2000 1
- (2000) Surf. Coat. Technol. , vol.135 , pp. 1
- Lapostolle, F.¹ Billard, A.² von Stebut, J.³

8
- 0035151541
- K. Okimura Surf. Coat. Technol. 135 2001 286
- (2001) Surf. Coat. Technol. , vol.135 , pp. 286
- Okimura, K.¹

9
- 0030217657
- M. Sasase K. Miyake T. Yamaki I. Takano S. Isobe Thin Solid Films 281-282 1996 431
- (1996) Thin Solid Films , vol.281-282 , pp. 431
- Sasase, M.¹ Miyake, K.² Yamaki, T.³ Takano, I.⁴ Isobe, S.⁵

10
- 0032482850
- F. Zhang X.H. Liu Thin Solid Films 326 1998 171
- (1998) Thin Solid Films , vol.326 , pp. 171
- Zhang, F.¹ Liu, X.H.²

11
- 0842306438
- A.M. Peiro E. Vigil J. Peral C. Domingo X. Domenech J.A. Ayllon Thin Solid Films 411 2002 185
- (2002) Thin Solid Films , vol.411 , pp. 185
- Peiro, A.M.¹ Vigil, E.² Peral, J.³ Domingo, C.⁴ Domenech, X.⁵ Ayllon, J.A.⁶

12
- 85037959609
- L.E. Alarcon E.H. Poniatowski M.A.C. Lopez M.F. Guasti J.J. Jarquin A.S. Pineda Surf. Eng. 15 5 1999 411
- (1999) Surf. Eng. , vol.15 , Issue.5 , pp. 411
- Alarcon, L.E.¹ Poniatowski, E.H.² Lopez, M.A.C.³ Guasti, M.F.⁴ Jarquin, J.J.⁵ Pineda, A.S.⁶

13
- 0036849796
- M.L. Lavcevic A. Turkovic Thin Solid Films 419 2002 105
- (2002) Thin Solid Films , vol.419 , pp. 105
- Lavcevic, M.L.¹ Turkovic, A.²

14
- 0033327722
- Z. Dai H. Naramoto K. Narumi S. Yamaoto J. Phys., Condens. Matter 11 1999 8511
- (1999) J. Phys., Condens. Matter , vol.11 , pp. 8511
- Dai, Z.¹ Naramoto, H.² Narumi, K.³ Yamaoto, S.⁴

15
- 0001389730
- C.C. Ting S.Y. Chen D.M. Liu J. Appl. Phys. 88 8 2000 4628
- (2000) J. Appl. Phys. , vol.88 , Issue.8 , pp. 4628
- Ting, C.C.¹ Chen, S.Y.² Liu, D.M.³

16
- 0036149532
- C.C. Ting S.Y. Chen D.M. Liu Thin Solid Films 402 2002 290
- (2002) Thin Solid Films , vol.402 , pp. 290
- Ting, C.C.¹ Chen, S.Y.² Liu, D.M.³

17
- 0017719586
- J.A. Thornton Annu. Rev. Mater. Sci. 7 1977 239
- (1977) Annu. Rev. Mater. Sci. , vol.7 , pp. 239
- Thornton, J.A.¹

18
- 0019097427
- Y.A. Bertin J.L. Gacougnolle J. Parisot J. de Fouquet D. Beshers Titanium'80: Science and Technology 1980 529
- (1980) Titanium'80: Science and Technology , pp. 529
- Bertin, Y.A.¹ Gacougnolle, J.L.² Parisot, J.³ de Fouquet, J.⁴ Beshers, D.⁵

19
- 0038482041
- H. Omari J.P. Boyeaux A. Errkik M. Lemiti A. Laugier J. Appl. Phys. 93 12 2003 9803
- (2003) J. Appl. Phys. , vol.93 , Issue.12 , pp. 9803
- Omari, H.¹ Boyeaux, J.P.² Errkik, A.³ Lemiti, M.⁴ Laugier, A.⁵

20
- 0032614865
- B.H. Lee Y. Jeon K. Zawadzki W.J. Qi J. Lee Appl. Phys. Lett. 74 21 1999 3143
- (1999) Appl. Phys. Lett. , vol.74 , Issue.21 , pp. 3143
- Lee, B.H.¹ Jeon, Y.² Zawadzki, K.³ Qi, W.J.⁴ Lee, J.⁵

21
- 36549102221
- G.P. Burns J. Appl. Phys. 65 5 1989 2095
- (1989) J. Appl. Phys. , vol.65 , Issue.5 , pp. 2095
- Burns, G.P.¹

22
- 0032483894
- K. Yokota T. Yamada F. Miyashita K. Hirai H. Takano M. Kumagai Thin Solid Films 334 1998 109
- (1998) Thin Solid Films , vol.334 , pp. 109
- Yokota, K.¹ Yamada, T.² Miyashita, F.³ Hirai, K.⁴ Takano, H.⁵ Kumagai, M.⁶

23
- 0029752308
- H.J. Seifert H.I. Lukas G. Petzow Z. Metallkd. 87 1996 2
- (1996) Z. Metallkd. , vol.87 , pp. 2
- Seifert, H.J.¹ Lukas, H.I.² Petzow, G.³

24
- 0029409662
- B. Cockeram G. Wang Thin Solid Films 269 1995 57
- (1995) Thin Solid Films , vol.269 , pp. 57
- Cockeram, B.¹ Wang, G.²

25
- 0003477976
- Weinheim: VSP
- I. Barin Data of Pure Substances, Part II 1989 VSP Weinheim
- (1989) Data of Pure Substances, Part II
- Barin, I.¹

26
- 0030291479
- L.A. Clevenger C. Cabral Jr. R.A. Roy C. Lavoie J. Jordan-Sweet S. Brauer G. Morales K.F. Ludwig Jr. G.B. Stephenson Thin Solid Films 289 1996 220
- (1996) Thin Solid Films , vol.289 , pp. 220
- Clevenger, L.A.¹ Cabral Jr., C.² Roy, R.A.³ Lavoie, C.⁴ Jordan-Sweet, J.⁵ Brauer, S.⁶ Morales, G.⁷ Ludwig Jr., K.F.⁸ Stephenson, G.B.⁹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.