Orientation control of textured PZT thin films sputtered on silicon substrate with TiOx seeding

Materials Research Bulletin

Volumn 35, Issue 9, 2000, Pages 1381-1390

  Bouregba, R ^a   Poullain, G ^a   Vilquin, B ^a   Murray, H ^a  

^a UNIVERSITÉ DE CAEN   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COERCIVE FORCE; FERROELECTRICITY; MAGNETRON SPUTTERING; PERMITTIVITY; REMANENCE; SILICON; SUBSTRATES; THIN FILMS; TITANIUM OXIDES; X RAY DIFFRACTION ANALYSIS;

POSTANNEALING TREATMENT;

DIELECTRIC FILMS;

EID: 0034217365     PISSN: 00255408     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0025-5408(00)00354-8     Document Type: Article

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