Electrical and optical properties of TiOx thin films deposited by reactive magnetron sputtering

Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 272-275

  Banakh, O ^a   Schmid, P E ^a   Sanjines R ^a   Levy F ^a  

^a EPFL   (Switzerland)

Author keywords

Spectroscopic ellipsometry; Thin films; Titanium oxide

Indexed keywords

ELLIPSOMETRY; IMPURITIES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SPECTROSCOPIC ANALYSIS; TITANIUM OXIDES;

BOLTZMANN EQUATION;

THIN FILMS;

ELECTRICAL PROPERTY; FILM; OPTICAL FEATURE; SPUTTERING; TITANIUM OXIDE;

EID: 0036495641     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01605-X     Document Type: Article

References (14)