Qualitative model of the magnetron discharge

Vacuum

Volumn 84, Issue 4, 2009, Pages 488-493

  Musschoot, J ^a   Haemers, J ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Current; dc; Discharge; Ionization; Magnetron; Model; Plasma; Pressure; Sheath; Sputter; Voltage

Indexed keywords

CURRENT; DC; DC DISCHARGES; DISCHARGE; PLASMA PRESSURES;

IONIZATION OF GASES; IONIZATION POTENTIAL; LEAKAGE (FLUID); MAGNETIC FIELDS; MAGNETRONS; PARTICLE DETECTORS; PLASMA DENSITY; SECONDARY EMISSION;

ELECTRIC DISCHARGES;

EID: 70649107753     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.10.011     Document Type: Article

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