Electrostatic fluctuations in a direct current magnetron sputtering plasma

Physics of Plasmas

Volumn 8, Issue 6, 2001, Pages 3042-3050

  Martines, E ^a   Cavazzana, R ^a   Serianni, G ^a   Spolaore, M ^a,b   Tramontin, L ^a   Zuin, M ^b   Antoni, V ^a,b  

^a Consorzio RFX ^*  (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035366569     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1369657     Document Type: Article

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