On the theory of low-pressure magnetron glow discharge

Physics of Plasmas

Volumn 7, Issue 1, 2000, Pages 382-390

  Pekker, L ^a   Krasheninnikov, S I ^b  

^a Deposition Sciences Inc   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000188995     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.873807     Document Type: Article

References (26)

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