Scanning proximity probes for nanoscience and nanofabrication

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1449-1455

  Rangelow, Ivo W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

AFM; Cantilever; Nanotechnology; Piezoresistive cantilever

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; CMOS INTEGRATED CIRCUITS; MICROMACHINING; PIEZOELECTRIC DEVICES; SENSORS;

NANOSCIENCE; PIEZORESISTIVE CANTILEVER; PIEZORESISTIVE SENSORS;

NANOTECHNOLOGY;

EID: 33646067777     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.199     Document Type: Article

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