SCOPUS 정보 검색 플랫폼

Volumn 395, Issue 6, 2009, Pages 1901-1909

Speciation of BC x N y films grown by PECVD with trimethylborazine precursor

(10) Baake, Olaf a Hoffmann, Peter S a Klein, Andreas a Pollakowski, Beatrix b Beckhoff, Burkhard b Kosinova, Marina L c Fainer, Nadeshda I c Sulyaeva, Veronica S c Trunova, Valentina A c Ensinger, Wolfgang a

a DARMSTADT UNIVERSITY OF TECHNOLOGY (Germany)

b PHYSIKALISCH TECHNISCHE BUNDESANSTALT (Germany)

c NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY (Russian Federation)

Author keywords

Boron carbonitride; NEXAFS; PECVD; Synthesis; XPS

Indexed keywords

BORON CARBONITRIDE; NEXAFS; PECVD; SYNTHESIS; XPS;

ABSORPTION SPECTROSCOPY; BORON; BORON CARBIDE; CARBON NITRIDE; GAS ABSORPTION; HELIUM; MOLECULAR OXYGEN; OXIDE MINERALS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUARTZ; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 70449596023 PISSN: 16182642 EISSN: 16182650 Source Type: Journal
DOI: 10.1007/s00216-009-3056-6 Document Type: Article

Times cited : (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.