Near-edge x-ray absorption fine structure study of bonding modifications in BN thin films by ion implantation

Applied Physics Letters

Volumn 68, Issue 20, 1996, Pages 2816-2818

  Jimenez I ^a   Jankowski, A ^a   Terminello, L J ^a   Carlisle, J A ^a   Sutherland, D G J ^a   Doll, G L ^b   Mantese, J V ^b   Tong, W M ^c   Shuh, D K ^c   Himpsel, F J ^d  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b GM Research Lab   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^d Wisconsin Electric Machines and Power Electronics Consortium   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1842712666     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116334     Document Type: Article

References (16)

1. R. F. Davis, Proc. IEEE INS 79, 702 (1991).
2. J. H. Edgar, J. Mater. Res. AIP 7, 235 (1992).
3. L. J. Terminello, A. Chaiken, D. A. Lapiano-Smith, G. L. Doll, and T. Sato, J. Vac. Sci. Technol. A AIP 12, 2462 (1994).
4. H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, S. Reinke, and M. Kuhr, Appl. Phys. Lett. AIP 67, 46 (1995).
5. S. Manorama, G. N. Chaudhari, and V. J. Rao, J. Phys. D INS 26, 1793 (1993).
6. P. B. Mirkarimi, D. L. Medlin, K. F. McCarty, and J. C. Barbour, Appl. Phys. Lett. AIP 66, 2813 (1995).
7. D. R. Strongin, J. K. Mowlem, M. W. Ruckman, and M. Strongin, Appl. Phys. Lett. AIP 60, 2561 (1992).
8. N. R. Nemanich, S. A. Solin, and R. M. Martin, Phys. Rev. B AIP 23, 6348 (1981).
9. D. M. Gruen, A. R. Krauss, C. D. Zuiker, R. Csencsits, L. J. Terminello, J. A. Carlisle, I. Jiménez, D. G. J. Sutherland, D. K. Shuh, W. M. Tong, and F. J. Himpsel, Appl. Phys. Lett. AIP 68, 1640 (1996).
10. A. Chaiken, L. J. Terminello, J. Wong, G. L. Doll, and C. A. Taylor, Appl. Phys. Lett. AIP 63, 2112 (1993).
11. K. Ogata, Y. Andoh, and F. Fujimoto, Nucl. Instrum. Methods B INS 80/81, 1427 (1993).
12. P. B. Mirkarimi, K. F. McCarty, D. L. Medlin, W. G. Wolfer, T. A. Friedman, E. J. Klaus, G. F. Cardinale, and D. G. Howitt, J. Mater. Res. AIP 9, 2925 (1994).
13. C. R. Aita, Mater Sci. Forum INS 54/55, 1 (1990).
14. A. L. Ballal, L. Salamanca Riba, G. L. Doll, C. A. Taylor, and R. Clarke, J. Mater. Res. AIP 7, 1618 (1992).
15. K. G. Tirsell and V. Karpenko, Nucl. Instrum. Methods A INS 291, 511 (1990).
16. J. Stöhr, NEXAFS Spectroscopy (Springer, New York, 1992).