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Volumn 9 pt 2, Issue 8, 1999, Pages
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LPCVD boron carbonitride films from triethylamine borane
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
AMMONIA;
BORON COMPOUNDS;
CHEMICAL BONDS;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL STRUCTURE;
FILM GROWTH;
ORGANIC COMPOUNDS;
PHASE COMPOSITION;
REFRACTIVE INDEX;
SYNTHESIS (CHEMICAL);
THERMOANALYSIS;
BORON CARBONITRIDE FILMS;
GROWTH RATES;
LOW PRESSURE CHEMICAL VAPOR DEPOSITION;
TRIETHYLAMINE BORANE;
THIN FILMS;
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EID: 0033187961
PISSN: 11554339
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1051/jp4:19998115 Document Type: Article |
Times cited : (15)
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References (22)
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