Simultaneous tomography and topography of silicon integrated circuits using full-field swept-source optical coherence tomography

Journal of Optics A: Pure and Applied Optics

Volumn 11, Issue 4, 2009, Pages

  Anna, Tulsi ^a   Shakher, Chandra ^a   Singh Mehta, Dalip ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Optical coherence tomography and topography; Optical metrology; Silicon integrated circuits

Indexed keywords

ACOUSTO-OPTIC TUNABLE FILTERS; AREA DETECTORS; BROADBAND LIGHT SOURCES; COMMON-PATH; FOURIER-FILTERING; FREQUENCY-TUNING; FULL-FIELD; HIGH STABILITY; INTERFERENCE FRINGE; INTERFEROGRAMS; MECHANICAL SCANNING; MICRO ELECTRO MECHANICAL SYSTEM; OPTICAL COHERENCE TOMOGRAPHY; OPTICAL COHERENCE TOMOGRAPHY AND TOPOGRAPHY; OPTICAL METROLOGY; OPTICAL SET-UP; PHASE MAPS; SILICON INTEGRATED CIRCUITS; SUPERLUMINESCENT DIODE; SWEPT SOURCE;

COHERENT LIGHT; INTERFEROMETRY; LIGHT SOURCES; MICHELSON INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; OPTICAL SYSTEMS; OPTICAL TOMOGRAPHY; TOMOGRAPHY;

INTEGRATED CIRCUITS;

EID: 70449365681     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/11/4/045501     Document Type: Article

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