Three-dimensional imaging of a silicon flip chip using the two-photon optical-beam induced current effect

Applied Physics Letters

Volumn 81, Issue 1, 2002, Pages 7-9

  Ramsay, E ^a   Reid, D T ^a   Wilsher, K ^b  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b SCHLUMBERGER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AXIAL DIRECTION; AXIAL SCANNING; FEMTOSECONDS; FLIP CHIP; LASER WAVELENGTH; MICRON RESOLUTION; MICROSCOPE OBJECTIVE; OPTICAL BEAM INDUCED CURRENTS; OPTICAL PROBING; SILICON INTEGRATED CIRCUITS; THREE DIMENSIONAL IMAGING; TWO PHOTON; TWO-PHOTON EXCITATIONS;

DEPTH PROFILING; IMAGING SYSTEMS; LASER EXCITATION; PHOTONS;

THREE DIMENSIONAL;

EID: 79956004306     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1491301     Document Type: Article

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