Fast, precise, tomographic measurements of thin films

Applied Physics Letters

Volumn 91, Issue 9, 2007, Pages

  Ghim, Young Sik ^a   Kim, Seung Woo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS; INTERFEROMETRY; MICROELECTRONICS; SEMICONDUCTOR MATERIALS; TOMOGRAPHY; VELOCITY MEASUREMENT;

DEPTH RESOLUTIONS; TOMOGRAPHIC HEIGHT MAPS; TOMOGRAPHIC MEASUREMENTS; WHITE LIGHT INTERFEROMETRY;

THIN FILMS;

EID: 34548433952     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2776015     Document Type: Article

References (10)

1. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1979).
2. P. S. Hauge, Surf. Sci. 96, 108 (1980).
3. H. G. Tompkins and W. A. McGahan, Spectroscopic Ellipsometry and Reflectometry: A User's Guide (Wiley, New York, 1999).
4. A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
5. M. Fury, Solid State Technol. 38, 47 (1995).
6. D. Boning, A. Hurwitz, J. Moyne, W. Moyne, S. Shellman, T. Smith, J. Taylor, and R. Telfeyan, IEEE Trans. Compon., Packag., Manuf. Technol., Part C 19, 307 (1996).
7. S.-W. Kim and G.-H. Kim, Appl. Opt. 38, 5968 (1999).
8. D. Kim, S. Kim, H. J. Kong, and Y. Lee, Opt. Lett. 27, 1893 (2002).
9. Y.-S. Ghim and S.-W. Kim, Opt. Express 14, 11885 (2006).
10. S. K. Debnath, M. P. Kothiyal, J. Schmidt, and P. Hariharan, Opt. Express 14, 4662 (2006).