MEMS profilometry by low coherence phase shifting interferometry: Effect of the light spectrum for high precision measurements

Optics Communications

Volumn 263, Issue 1, 2006, Pages 6-11

  Jorez, S ^a   Cornet, A ^a   Raskin, J P ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; LIGHT SOURCES; OPTICAL DEVICES; PHASE SHIFT; PROFILOMETRY;

BROADBAND SOURCE; MICRO ELECTRO MECHANICAL SYSTEMS; NANOMETERS; PRECISION MEASUREMENTS;

INTERFEROMETRY;

EID: 33744980902     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2006.01.005     Document Type: Article

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