Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film

Optics Express

Volumn 13, Issue 25, 2005, Pages 10066-10074

  Akiyama, Hisashi ^a   Sasaki, Osami ^a   Suzuki, Takamasa ^a  

^a NIIGATA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL FILTERS; OPTIMIZATION; SEMICONDUCTOR LASERS; SILICON COMPOUNDS; THIN FILMS;

FILM THICKNESS; OPTICAL PATH DIFFERENCE (OPD); SILICON DIOXIDE FILMS;

INTERFEROMETERS;

EID: 28944436083     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.010066     Document Type: Article

References (10)

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