Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter

Optics Letters

Volumn 27, Issue 21, 2002, Pages 1893-1895

  Kim, Daesuk ^a   Kim, Soohyun ^a   Kong, Hong Jin ^a   Lee, Yunwoo ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTOOPTICAL DEVICES; FAST FOURIER TRANSFORMS; MIRRORS; PROFILOMETRY; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

ACOUSTO-OPTIC TUNABLE FILTERS;

OPTICAL FILTERS;

EID: 0036867624     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.27.001893     Document Type: Article

References (8)

1. P. de Groot and L. Dech, Opt. Lett. 18, 1462 (1993).
2. J. Schwider and L. Zhou, Opt. Lett. 19, 995 (1994).
3. U. Schnell and R. Dandliker, Opt. Lett. 21, 528 (1996).
4. P. Sandoz, G. Tribillon, and H. Perrin, J. Mod. Opt. 43, 701 (1996).
5. P. Hariharan and R. Maitreyee, J. Mod. Opt. 43, 1979 (1996).
6. S.W. Kim and G.H. Kim, Appl. Opt. 38, 5968 (1999).
7. M. Takeda, H. Ina, and S. Kobayashi, J. Opt. Soc. Am. 72, 156 (1982).
8. The Levenberg-Marquardt algorithm is available as the lsqnonlin function by a commerical S/W MATLAB.