Two-photon optical beam induced current imaging through the backside of integrated circuits

Applied Physics Letters

Volumn 71, Issue 18, 1997, Pages 2578-2580

  Xu, Chris ^a   Denk, Winfried ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ENERGY GAP; INTEGRATED CIRCUITS; LIGHT ABSORPTION; PHOTONS; THREE DIMENSIONAL;

ELECTRON HOLE PAIRS; OPTICAL BEAMS;

IMAGING TECHNIQUES;

EID: 0031551639     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119334     Document Type: Article

References (11)

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