Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

Optics Express

Volumn 14, Issue 24, 2006, Pages 11885-11891

  Ghim, Young Sik ^a   Kim, Seung Woo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC AMPLIFIERS; DISPERSIONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERFEROMETRY; MEASUREMENT THEORY; REFRACTIVE INDEX; SIGNAL INTERFERENCE;

DIELECTRIC THIN-FILM LAYERS; FOURIER-TRANSFORM ANALYSIS; WHITE-LIGHT INTERFEROMETRY;

THIN FILMS;

EID: 34548391656     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.011885     Document Type: Article

References (11)

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