Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates

Optics Express

Volumn 14, Issue 11, 2006, Pages 4662-4667

  Debnath, Sanjit K ^a   Kothiyal, Mahendra P ^a   Schmit, Joanna ^b   Hariharan, Parameswaran ^c  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

^b VEECO INSTRUMENTS INC   (United States)

^c UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER HARDWARE; ELECTROMAGNETIC WAVE INTERFERENCE; PHASE SHIFT; THIN FILMS;

PHASE-SHIFTING INTERFERENCE MICROSCOPY; THICKNESS-PROFILE MEASUREMENTS; THIN FILM LAYERS;

MICROSCOPIC EXAMINATION;

EID: 33744528660     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.004662     Document Type: Article

References (16)

1. S. S. C. Chim and G. S. Kino, "Correlation microscope," Opt. Lett. 15, 579-581 (1990).
2. B. S. Lee and T. C. Strand, "Profilometry with a coherence scanning microscope," Appl. Opt. 29, 3784-3788 (1990).
3. P. Hariharan and M. Roy, "White-light phase-stepping interferometry for surface profiling," J. Mod. Opt. 41, 2197-2201 (1994).
4. P. Hariharan and M. Roy, "Interferometric surface profiling with white light: effect of surface films," J. Mod. Opt. 43, 1797-1800 (1996).
5. S. W. Kim and G. H. Kim, "Thickness profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968-5973 (1999).
6. D. Kim and S. Kim, "Direct spectral phase function calculation for dispersive interferometric thickness profilometry," Opt. Express, 12, 5117-5124 (2004).
7. D. Kim, S. Kim, H. Kong and Y. Lee, "Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter," Opt. Lett. 27, 1893-1895 (2002).
8. J. Calatroni, A. L. Guerrero, C. Sainz and R. Escalona, "Spectrally resolved white-light interferometry as a profilometry tool," Opt. Laser Technol. 28, 485-489 (1996).
9. P. Sandoz, G. Tribillon and H. Perrin, "High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms," J. Mod. Opt. 43, 701-708 (1996).
10. S. S. Helen, M. P. Kothiyal and R. S. Sirohi, "Analysis of spectrally resolved white light interferograms: use of a phase shifting technique," Opt. Eng. 40, 1329-1336 (2001).
11. S. K. Debnath and M. P. Kothiyal, "Optical profiler based on spectrally resolved white light interferometry," Opt. Eng. 44, 013606 (2005).
12. P. Hariharan, B. F. Oreb and T. Eiju, "Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm," Appl. Opt. 26, 2504-2506 (1987).
13. J. Schmit and K. Creath, "Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry," Appl. Opt. 34, 3610-3619 (1995).
14. J. Schmit and K. Creath, "Window function influence on phase error in phase-shifting algorithms," Appl. Opt. 35, 5642-5649 (1996).
15. th Ed. (Cambridge University Press, 1999), pp. 752-758.
16. A. Harasaki and J. C. Wyant, "Fringe modulation skewing effect in white light vertical scanning interferometry," Appl. Opt. 39, 2101-2106 (2000).