High spatial resolution subsurface microscopy

Applied Physics Letters

Volumn 78, Issue 26, 2001, Pages 4071-4073

  Ippolito, S B ^a   Goldberg, B B ^a   Unlu M S ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035948103     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1381574     Document Type: Article

References (7)

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5. Instruments of Hamamatsu Corporation, 360 Foothill Road, Bridgewater, NJ 08807, http://www.hamamatsu.com
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7. SRAM chip fabricated by a 0.18 μm process from a major semiconductor manufacturer.