Effects of gap error on the capacitive micro accelerometer

DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2009, Pages 307-312

  Zhou, Wu ^a,b   He, Xiao Ping ^b   Su, Wei ^b   Li, Bai Lin ^a   Chen, Li Li ^a  

^a SWJTU   (China)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL METHOD; CAPACITIVE MICRO ACCELEROMETER; DESIGN VALUE; FORCE BALANCE EQUATION; MEMS-STRUCTURE; PROCESS ERRORS; PULL-IN VOLTAGE; SIGNIFICANT FACTORS; SMALL SIZE; STRUCTURE ERRORS; STRUCTURE PARAMETER; TWO GAPS; TYPE ERRORS; UN-UNIFORMITY; UNSYMMETRICAL;

ACCELEROMETERS; ERRORS;

DESIGN;

EID: 70349221248     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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