A modeling and analysis of spring-shaped torsion micromirrors for low-voltage applications

International Journal of Mechanical Sciences

Volumn 48, Issue 6, 2006, Pages 650-661

  Huang, J M ^a   Liu, A Q ^b   Deng, Z L ^a   Zhang, Q X ^c  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Electrostatic torsion micromirror; MOEMS; Optical MEMS; Pull in effect

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTROSTATICS; MATHEMATICAL MODELS; STIFFNESS; TORSIONAL STRESS;

ELECTROSTATIC TORSION MICROMIRROR; MOEMS; OPTICAL MEMS; PULL-IN EFFECT;

MIRRORS;

EID: 33645090984     PISSN: 00207403     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmecsci.2005.12.011     Document Type: Article

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