Corrigendum to "A simple method for calculation of the pull-in voltage and touch-point pressure for the small deflection of square diaphragm in MEMS" (DOI:10.1016/j.sna.2007.10.036);A simple method for calculation of the pull-in voltage and touch-point pressure for the small deflection of square diaphragm in MEMS

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 376-382

  Sharma, Anurekha ^a   George, P J ^a  

^a KURUKSHETRA UNIVERSITY   (India)

Author keywords

Diaphragm; MEMS; Pull in voltage; Touch point pressure

Indexed keywords

ACCELERATION; DIAPHRAGMS; ELECTRODES; FINITE ELEMENT METHOD; PRESSURE CONTROL; TRANSDUCERS; VOLTAGE MEASUREMENT;

PULL IN VOLTAGE; TOUCH POINT PRESSURE; TRANSDUCTION;

MEMS;

EID: 38149016103     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.03.001     Document Type: Erratum

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