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Computers and Structures

Volumn 83, Issue 15-16, 2005, Pages 1320-1329

Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage

(4) Abdalla, Mostafa M a Reddy, Chevva Konda b Faris, Waleed F b Gürdal, Zafer a,b,c

a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY (United States)

b Virginia Polytechnic Institute and State University (United States)

c DELFT UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

MEMS; Microbeam; Normal flow algorithm; Optimality criteria

Indexed keywords

ACTUATORS; ALGORITHMS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; SENSORS;

MICROBEAMS; NORMAL FLOW ALGORITHMS; OPTIMALITY CRITERIA; PULL IN VOLTAGE;

BEAMS AND GIRDERS;

EID: 17044385793 PISSN: 00457949 EISSN: None Source Type: Journal
DOI: 10.1016/j.compstruc.2004.07.010 Document Type: Article

Times cited : (57)

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