Closed-form solutions of the parallel plate problem

Sensors and Actuators, A: Physical

Volumn 133, Issue 2 SPEC. ISS., 2007, Pages 518-525

  Lee, Ki Bang ^a  

^a KB Lab   (Singapore)

Author keywords

bioMEMS; Capacitance; Closed form solutions; Effective stiffness; Electrostatic microactuators; MEMS; Microsensors; Parallel plate; Pull in phenomenon; Resonant frequency; Sensitivity

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; NATURAL FREQUENCIES; NONLINEAR EQUATIONS; PRODUCT DESIGN;

CLOSED-FORM SOLUTIONS; EFFECTIVE STIFFNESS; PARALLEL PLATES; PULL-IN PHENOMENON;

CAPACITORS;

EID: 33846518232     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.049     Document Type: Article

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