Mechanical characterization of micromachined capacitive switches: Design consideration and experimental verification

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 36-48

  Huang, J M ^a   Liu, A Q ^a   Lu, C ^b   Ahn, J ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

Author keywords

Micromachined capacitive switch; Microwave and wireless communication; Optical interferometry; RF MEMS

Indexed keywords

ELECTRIC CONDUCTORS; ELECTRIC POTENTIAL; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; STIFFNESS; WAVEGUIDES;

MICROMACHINED CAPACITIVE SWITCHES; OPTICAL INTERFEROMETRY;

ELECTRIC SWITCHES;

EID: 0345566223     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00291-7     Document Type: Conference Paper

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