Pull-in instability of two opposing microcantilever arrays with different bending rigidities

International Journal of Mechanical Sciences

Volumn 50, Issue 1, 2008, Pages 55-68

  Zhu, Jian ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

End effect; MEMS; Structural instability; Surface forces

Indexed keywords

DEFLECTION (STRUCTURES); MEMS; MICROSTRUCTURE; NUMERICAL METHODS; RIGIDITY;

END EFFECT; STRUCTURAL INSTABILITY; SURFACE FORCES;

CANTILEVER BEAMS;

EID: 36549050340     PISSN: 00207403     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmecsci.2007.05.004     Document Type: Article

References (30)

1. Maboudian R., and Howe R.T. Critical review: adhesion in surface micromechanical structures. Journal of Vacuum Science & Technology B 15 (1997) 1-20
2. Tas N., Sonnenberg T., Jansen H., Legtenberg R., and Elwenspoek M. Stiction in surface micromachining. Journal of Micromechanics and Microengineering 6 (1996) 385-397
3. Mastrangelo C.H. Adhesion-related failure mechanisms in micromechanical devices. Tribology Letters 3 (1997) 223-238
4. Bhushan B. Adhesion and stiction: mechanism, measurement techniques, and methods for reduction. Journal of Vacuum Science and Technology B 21 (2003) 2262-2296
5. Komvopoulos K. Adhesion and friction forces in MEMS. Journal of Adhesion Science and Technology 17 (2003) 477-517
6. Zhao Y.P., Wang L.S., and Yu T.X. Mechanics of adhesion in MEMS: a review. Journal of Adhesion Science and Technology 17 (2003) 519-546
7. Pelesko J.A., and Bernstein D.H. Modeling MEMS and NEMS (2003), Chapman & Hall/CRC, London, Boca Raton
8. Jaecklin V.P., Linder C., Rooij N.F., and Moret J.M. Micromechanical comb actuators with low driving voltages. Journal of Micromechanics and Microengineering 2 (1992) 250-255
9. Legtenberg R., Goreneveld A.W., and Elwenspoek M. Comb-drive actuators for large displacements. Journal of Micromechanics and Microengineering 6 (1996) 320-329
10. Harness T., and Syms R.A. Charcteristic modes of electrostatic combdrive X-Y microactuators. Journal of Micromechanics and Microengineering 10 (2000) 7-14
11. Grade J.D., Jerman H., and Kenny T.W. Design of large deflection electrostatic actuators. Journal of Microelectromechanical Systems 12 (2003) 335-343
12. Zhou G., and Dowd P. Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators. Journal of Micromechanics and Microengineering 13 (2003) 178-183
13. Sounart T.L., Michalske T.A., and Zavadil K.R. Frequency-dependent electrostatic actuation in microfluidic MEMS. Journal of Microelectromechanical Systems 14 (2005) 125-133
14. Buks E., and Roukes M.L. Electrically tunable collective response in a coupled micromechanical array. Journal of Microelectromechanical Systems 11 (2002) 802-807
15. Lifshitz R., and Cross M.C. Response of parametrically driven nonlinear coupled oscillators with application to micromechanical and nanomechanical resonator arrays. Physical Review B 67 (2003) 134302
16. Zhu J., Ru C.Q., and Mioduchowski A. Surface energy-driven adhesion of two opposing microcantilevers. Acta Mechanica 184 (2006) 33-45
17. Zhu J., Ru C.Q., and Mioduchowski A. Surface-forces-driven instability of comb-drive microcantilevers in MEMS. Journal of Adhesion Science and Technology 20 (2006) 1125-1146
18. Zhu J., Ru C.Q., and Mioduchowski A. Structural instability of a parallel array of mutually attracting identical microbeams. Journal of Micromechanics and Microengineering 16 (2006) 2220-2229
19. In: Bhushan B. (Ed). Springer handbook of nanotechnology (2004), Springer, Berlin
20. Timoshenko S.P. Theory of elastic stability (1961), McGraw-Hill, New York
21. Chajes A. Principles of structural stability theory (1974), Prentice-Hall, Englewood Cliffs, NJ
22. Fairweather G. Finite element Galerkin methods for differential equations (1978), M. Dekker, New York
23. Krasnosel'skii M.A. Convergence of Galerkin method for non-linear equations (1971), National Research Council of Canada, Ottawa
24. Craighead H.G. Nanoelectromechanical systems. Science 290 (2000) 1532-1535
25. Hierold C. From micro-to nanosystems: mechanical sensors go nano. Journal of Micromechanics and Microengineering 14 (2004) S1-S11
26. Treacy M.M., Ebbesen T.W., and Gibson J.M. Exceptionally high Young's modulus observed for individual carbon nanotubes. Nature (London) 381 (1996) 678-680
27. Wong E.W., Sheehan P.E., and Lieber C.M. Nanobeam mechanics: elasticity, strength, and toughness of nanorods and nanotubes. Science 277 (1997) 1971-1975
28. Poncharal P., Wang Z.L., Ugarte D., and de Heer W.A. Electrostatic deflections and electromechanical resonances of carbon nanotubes. Science 283 (1999) 1513-1516
29. Dequesnes M., Rotkin S.V., and Aluru N.R. Calculation of pull-in voltages for carbon-nanotube-based nanoelectromechanical switches. Nanotechnology 13 (2002) 120-131
30. Ru C.Q. Elastic models for carbon nanotubes. In: Nalwa H.S. (Ed). Encyclopedia of nanoscience and nanotechnology vol. 2 (2004), American Scientific Publishers, California, Stevenson Ranch 731-744