Characterization of coupled-domain multi-layer microplates in pull-in phenomenon, vibrations and dynamics

International Journal of Mechanical Sciences

Volumn 49, Issue 11, 2007, Pages 1226-1237

  Moghimi Zand, M ^a   Ahmadian, M T ^a  

^a Robotics and Automation   (Iran)

Author keywords

Dynamics; Electrostatic; Multi layer microplates; Pull in; Squeeze film damping; Vibration

Indexed keywords

ALGORITHMS; CHARACTERIZATION; DAMPING; DYNAMICS; RESONANCE; REYNOLDS EQUATION; VIBRATION ANALYSIS;

ELECTROSTATIC; FINITE DIFFERENCE METHODS; FIRSTORDER SHEAR DEFORMATION THEORY; MULTI-LAYER MICROPLATES; PULL-IN PHENOMENON; SQUEEZE FILM DAMPING;

PLATES (STRUCTURAL COMPONENTS);

EID: 35348818744     PISSN: 00207403     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmecsci.2007.03.012     Document Type: Article

References (13)

1. Osterberg PM. Electrostatically actuated microelectromechanical test structures for material property measurement. PhD dissertation, Massachusetts Institute of Technology, 1995.
2. Nayfeh A.H., and Younis M.I. A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze film damping. Journal of Micromechanics and Microengineering 14 (2004) 170-181
3. Younis MI. Modeling and simulation of microelectromechanical systems in multi-physics fields. PhD dissertation, Virginia Polytechnic Institute and state University, 2004.
4. Zhang W., and Meng G. Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitations in MEMS. Sensors and Actuators A 119 (2005) 291-299
5. Zhou Y.H., and Yang X. Numerical analysis on snapping induced by electromechanical interaction of shuffling actuator with nonlinear plate. Computers and Structures 81 (2003) 255-264
6. Abdalla M.M., Reddy C.K., Faris W.F., and Gurdal Z. Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage. Computers and Structures 83 (2005) 1320-1329
7. Rong H., Huang Q.A., Nie M., and Li W. An analytical model for pull-in voltage of clamped-clamped multilayer beams. Sensors and Actuators A 116 (2004) 15-21
8. Reddy JN. Mechanics of laminated composite plates and shells: theory and analysis, 2004.
9. Hoffmann KA, Chiang ST. Computational fluid dynamics for engineers, vol. 1, 1993.
10. Chowdhury S., Ahmadi M., and Miller W.C. A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams. Journal of Micromechanics and Microengineering 15 4 (2005) 756-763
11. Ozdoganlar OB, Hanshe BD, Came T. Experimental modal analysis for microsystems. In: Proceedings of 21st international modal analysis conference IMAC, 2003. p. 26-38.
12. Krylov S., and Maimon R. Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force. ASME Journal of Vibration and Acoustics 126 3 (2004) 332-342
13. Rocha L.A., Cretu E., and Wolffenbuttel R.F. Behavioural analysis of the pull-in dynamic transition. Journal of Micromechanics and Microengineering 14 (2004) S37-S42